Condition: New Other. Comes in non-original sealed ESD packaging.
Notes: No manuals, cords/cables, or additional items are included if not listed or shown.
- (1) Celerity Unit UFC-8565C Mass Flow Controller
- (1) Certificate of Conformance
- Manufacturer: Celerity
- Brand: Unit
- Model: UFC-8565C
- AMAT Part #: 0190-16332-003
- Description: Mass Flow Controller
- Process Gas: NF3 (Nitrogen Trifluoride Gas)
- Flow Rate: 5,000 SCCM (5 SLM)
- Seals: Downport - C Seals
- Interface: DeviceNet (5 Pin "M8")
- Mounting Position: Horizontal or Vertical
- Footprint: 1.125"
- Surface Finish: 4µ inch Ra
- Valve Position: Normally Closed (NC)
- Gas and Range Configurable: Yes
- Weight: 2.30 lbs.
- Condition: NEW
- Quantity: 1
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