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MKS AsTeX AX7645RH-10 Astron hf-s Reactive Gas Plasma Generator Head Only AX7645

Eligible to ship UPS Ground to the contiguous US
Current Stock:

Product Description

Manufacturer: MKS

Model: AX7645RH-10

Condition: Used. Comes in non-original packaging.  This generator is in Fair cosmetic condition with lots of scuffs/scratches around the corners of the enclosure.  The warranty labels were broken so we opened it and found the interior looks very clean and complete.  Inside the wetted area looks clean but we are not sure of the contamination history of this item. The photos show the exact item(s) the buyer will receive.

Notes: This unit is in Good working condition.  We got it from a system builder who tested it and set it aside as a spare.  No other testing was done. No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1) MKS AX7645RH-10 Reactive Gas Generator (Plasma Section)


  • Manufacturer: MKS (AsTeX Products)
  • Model: ASTRONhf-s
  • Reactive gas generator
  • P/N: AX7645RH-10
  • Rev. C
  • Higher flow variant
  • Broad operating range, up to 15 SLM NF3 and high flows of other gases
  • Compact, lid-mountable plasma section (requires rack-mounted power supply, not included)
  • Close coupling of plasma section improves efficiency
  • No Argon required during operation (only required during plasma initiation)
  • High dissociation rate  over broad pressure range for robust operation
  • Compatible with 200mm and 300mm chambers
  • Suitable for continuous operation
  • Water-cooled

Requires power supply, not included!

30 Day Guarantee

  • Guaranteed to be as described
  • Can be returned for flaws or malfunctions that were not disclosed
  • See complete terms

CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.

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