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Horiba Stec D514MG Criterion Digital MFC Mass Flow Controller NF3 500SCCM .5SLM

Current Stock:

Product Description

Manufacturer: Horiba Stec

Model: D514MG

Condition: Used. This MFC is in good cosmetic condition with minor scuffs and scratches from normal use.  The Process Gas/Flow sticker on the top of the MFC is different from the Gas identification on the side label.  We have defined the gas on the side label as calibration gas/flow and the top customer sticker as process gas/flow.  Comes in non-original packaging.
Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This MFC was removed from decommissioned equipment and has not been tested.
No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1)  Horiba Stec D514MG Criterion Digital MFC Mass Flow Controller NF3 500SCCM .5SLM


  • Manufacturer:  Horiba Stec
  • Model:  D514MG
  • Description:  Criterion Digital Mass Flow Controller MFC
    • Process Gas:  NF3 Nitrogen Trifluoride
    • Process Flow Rate:  500SCCM .5 SLM
    • Calibration Gas:  N2 Nitrogen Gas
    • Calibration Flow Rate:  687SCCM .687SLM
    • Primary Connector:  5-Pin Device Net
    • Surface Mount
    • Seal:  C-Seal
    • Valve:  C
    • MR. MG-05
    • Inlet:  M: 240~450kPa(A)
    • Fitting:  14C3
    • SIG:  S15
    • Protocol:  D-NET
    • A-OBJ002, 007
    • OPTION:  3171
    • Temp:  AMB.
    • HGS No. 1265 1529
    • MFG No. 34 1265 1529
    • Type No. 001113
    • 0190-84358

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  • Return window is 30 days from delivery date
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CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.

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