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Celerity Unit UFC-8565C Mass Flow Controller MFC Valve D-Net (SiH4/300cc) C-Seal

Current Stock:

Product Description

Manufacturer: Celerity

Model: UFC-8565C

Condition: Used. Comes in a non-original sealed ESD-safe bag.  This mass flow controller is in excellent condition with a few very minor scuffs and scratches from normal use, but nothing major or anything that would affect function. Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This mass flow controller was pulled from a working setup that was being decommissioned, but was not tested separately after removal. No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1) Celerity Unit UFC-8565C Mass Flow Controller


  • Manufacturer: Celerity
  • Brand: Unit
  • Model: UFC-8565C
  • AMAT Part #: 0190-16329-03
  • Type: MultiFlo (SC14)
  • Process Gas: SiH4 (Silane Gas)
  • Flow Rate: 300 SCCM
  • Seals: Downport - C Seals
  • Interface: DeviceNet (5 Pin "M8")
  • Mounting Position: Horizontal or Vertical
  • Footprint: 1.125"
  • Surface Finish: 4µ inch Ra
  • Valve Position: Normally Closed
  • Gas and Range Configurable: Yes
  • Weight: 2.30 lbs.
  • Condition: Used
  • Quantity: 1

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  • Return window is 30 days from delivery date
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