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Celerity Unit UFC-8565C Mass Flow Controller MFC 5-Pin D-Net (NF3/5 SLM) C-Seals

Current Stock:

Product Description

Manufacturer: Celerity

Model: UFC-8565C

Condition: Used. Comes in a non-original ESD bag.  This mass flow controller is in good cosmetic condition with a few minor scuffs and scratches from normal use, but nothing major or anything that would affect function. Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This flow controller was pulled from a working environment but was not tested separately after removal. No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1) Celerity Unit UFC-8565C Mass Flow Controller MFC


  • Manufacturer: Celerity
  • Brand: Unit
  • Model: UFC-8565C
  • AMAT Part #: 0190-16332-003
  • Type: MultiFlo (SC17)
  • Process Gas: NF3 (Nitrogen Trifluoride Gas)
  • Flow Rate: 5,000 SCCM (5SLM)
  • Seals: Downport - C Seals
  • Interface: DeviceNet (5 Pin "M8")
  • Mounting Position: Horizontal or Vertical
  • Footprint: 1.125"
  • Surface Finish: 4µ inch Ra
  • Valve Position: Normally Closed
  • Gas and Range Configurable: Yes

Hassle Free Returns

  • DougDeals will pay return shipping if the item needs to be returned for any reason
  • Return window is 30 days from delivery date
  • See complete terms

CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.

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