MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet

Manufacturer: MKS

Model: DLTNA3-33135

Condition: New Other. Comes in original packaging. The box and bag have been opened and the bottom of the unit has markings from the installation and testing by the manufacturer but it is in NEW and UNUSED condition.
Cosmetic appearance may vary slightly from pictured unit(s).

Notes: No manuals, cords/cables, or additional items are included if not listed or shown.

Included:

• (1) MKS DLTNA3-33135 Delta III 3-Zone FRC Flow Ratio Controller 1000 SCCM N2 DNet

Specifications:

• Manufacturer: MKS
• Model: DLTNA3-33135
• Type: Delta III Flow Ratio Controller
• Full-Scale Flow Range 1000 sccm (1 SLM)
• Calibration Gas: N2 (Nitrogen)
• Percentage Accuracy ±2% set point (for flow ≥10% of channel Full Scale)
• Channel Flow Control Range 0, 5-100% Full Scale
• Ratio Control Range 0, 5-100% Full Scale
• Percentage Repeatability ±0.3% of set point
• Repeatability ±0.3% of set point
• Resolution 0.02% of channel Full Scale
• Maximum Operating Outlet Pressure 200 Torr at maximum flow rate through all channels
• Maximum Allowable Outlet Pressure Differential 50 Torr with the same percentage flow through all channels
• Normal Operating Pressure Differential <150 Torr @ 3K split 33.3%; Except, <450 Torr for 10K/10K
• Percentage Settling Time <3 seconds (typical dependent on downstream conductance matching)
• Input Ratio Range 0, 2 to 100% of total flow within flow channel control range
• Maximum Inlet Pressure 150 psig (non-operational)
• Zero Temperature Coefficient <0.05% Full Scale/°C (500 ppm)
• Span Temperature Coefficient <0.08% of Reading/°C (800 ppm)
• Warm-up Time 60 minutes
• Operating Temperature 10-40°C
• Storage Temperature -20-65°C
• Storage Humidity 0-95% relative humidity, non-condensing
• Temperature Display 0-100°C
• Temperature Accuracy 2°C
• Temperature Resolution 0.1°C
• Fitting Type 4 VCR male, non-rotatable
• External Leak Integrity <1x10-10 (scc/sec He)
• Leak Integrity Through Closed Valve <2% of channel Full Scale at 500 Torr differential to <10 Torr
• Mounting: Inline
• Input Port: 1/4" Male VCR
• Output Port 1: 1/4" Male VCR
• Output Port 2: 1/4" Male VCR
• Output Port 3: 1/4" Male VCR

Hassle Free Returns

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• Return window is 30 days from delivery date
• See complete terms

CDN Systems LLC, DBA Doug Deals, is not an authorized distributor or affiliated with the manufacturer of this product. Original manufacturer's warranty does not apply.