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Brooks SLA7950D Digital MFC Mass Flow Controller 1/4" VCR Device Net (Ar/200cc)

Current Stock:

Product Description

Manufacturer: Brooks Instrument

Model: SLA7950D1EGG1A2A1

Condition: Used. Comes in non-original sealed ESD packaging.  This mass flow controller is in great condition with a few very minor scuffs and scratches on the case, but nothing major or anything that would affect function. Cosmetic appearance may vary slightly from pictured unit(s).

Notes: This mass flow controller was pulled from a working assembly that was being decommissioned, but was not tested separately after removal. No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1) Brooks Instrument SLA7950D Mass Flow Controller


  • Manufacturer: Brooks Instrument
  • Model: SLA7950D
  • Model Number: SLA7950D1EGG1A2A1
  • AMAT Part #: 41529-32
  • Description: Mass Flow Controller (MFC)
  • Gas: Ar (Argon Gas)
  • Flow Rate: 200 SCCM
  • Interface: DeviceNet
  • End Connection: 1/4" Male VCR
  • Flow Accuracy: ± 0.7% of rate plus ± 0.2% F.S at calibration conditions
  • Repeatability: ± 0.25% of rate
  • Stability: Less than ± 0.5% of rate per year
  • Materials of Construction: 316L, 316L VAR (vacuum arc remelt) and high alloy ferritic stainless steel
  • Seal Material: Nickel
  • Surface Finish: 10 Ra
  • Weight: 2.05 lbs.
  • Condition: Used
  • Quantity: 1

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