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NEW Brooks EFEM Wafer Load Port Cassette Module (002-7560-03)

$499.99 $349.99
(You save $150.00)
Current Stock:

Product Description

Manufacturer: Brooks

Model: 002-7560-03

Condition: New Other. Comes in original packaging.  As you can see in picture 4, this unit was test mounted, but was never actually put into service and is still in near pristine cosmetic condition. Cosmetic appearance may vary slightly from pictured unit(s).

Notes: No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1) Brooks Automation 002-7560-03 Cassette Wafer Load Port Module
  • (1) Brooks Automation CD ROM Manual (PDF Files)


  • Manufacturer: Brooks Automation
  • Part #: 002-7560-03
  • Description: This item is part of an EFEM (Equipment Front-End Module) system.  This system is used for transporting wafers and can be attached to a larger wafer processing machine.  A typical system can hold up to four load ports as long as the BOLTS match.
  • For Use With: FabExpress FX2000, FX3000, or FX4000
  • No Controller Software Needed
  • 1 Keypad with 4 Status Indicators
  • Condition: NEW

Hassle Free Returns

  • DougDeals will pay return shipping if the item needs to be returned for any reason
  • Return window is 30 days from delivery date
  • See complete terms

Other Details

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