Manufacturer: Brooks Instrument
Condition: Used. Comes in non-original sealed ESD packaging. The photos show the exact item(s) the buyer will receive.
Notes: No manuals, cords/cables, or additional items are included if not listed or shown.
- (1) Brooks Instrument SLA7950S Mass Flow Controller
- Manufacturer: Brooks Instrument
- Model: SLA7950S
- Model Number: SLA7950S1EGG1B2E1
- Gas: SiH4 (Silane)
- Flow Rate: 1,500 SCCM (1.5 SLPM)
- Interface: 9-Pin "D-Sub"
- Seals: C-Seals
- Max. Operating Pressure: 1500 psig
- Max. Inlet Pressure: 150 psig
- Flow Accuracy: ± 0.7% of rate plus ± 0.2% F.S at calibration conditions
- Repeatability: ± 0.25% of rate
- Stability: Less than ± 0.5% of rate per year
- Materials of Construction: 316L, 316L VAR (vacuum arc remelt) and high alloy ferritic stainless steel
- Seal Material: Nickel
- Surface Finish: 10 Ra
- Weight: 2.15 lbs.
- Condition: Used
- Quantity: 1
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