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Accent Optical Caliper 300mm Wafer Stage w/ Anorad/Starrett 17" x 12" X/Y Travel

$11,499.99 $9,774.99
(You save $1,725.00)
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Product Description

Manufacturer: Accent Optical Technologies

Model: Caliper Elan Ultra

Condition: Used. This lot is in Good cosmetic condition with minor blemishes from prior use (small scuffs/scratches, adhesive label residues). The photos show the exact item(s) the buyer will receive.

Notes: This lot was decommissioned by a local semiconductor manufacturer.  We do not have the complete system and can't do thorough testing.  The main input power cable was cut, so we ran power cables to each of the electronics boxes separately.  The computer boots and says (correctly) there is no boot drive(no hard drive present).  The filter/fan units run.  The limit switches on the stage light up. The motors on the stage neither move nor resist motion when the system powers on.  No other testing was done. No manuals, cords/cables, or additional items are included if not listed or shown.


  • (1) Nanometrics Caliper Elan Ultra enclosure with electronics cabinet
  • (1) Anorad 102403-310 Wafer Stage


  • Manufacturer: Accent Optical Technologies
  • part of the Nanometrics Caliper Elan Ultra system
  • Stage Anorad Model: 102403-310
    • X/Y/Theta stage with Anorad motors
    • Stage for 300mm wafers with slot for robotic wafer handler "hand"
    • Travel: 17"X axis, 12" Y axis, over 180º rotation axis
    • Linear motors: Anorad LE-series
      • Linear motor: Anorad LEA-P/N-42665-N
      • Linear motor: Anorad LEB-P/N-42673-N
      • Ironless motors
      • No cogging
      • Extremely smooth, precise motion
    • Linear rails: THK SSR20, 4 bearings and 2 rails per axis
    • Linear encoders: Heidenhain LIF101C series exposed glass scales
    • Optical head: Accent Optical Y8371300 and Y8375000
    • Camera: VDS Vosskuhler CCD-1300QLN
    • Camera: VDS Vosskuhler CCD-1300LN
    • Camera: Cohu 2952-2000
    • Objective lenses: 70x and unmarked
    • Table: Starrett Tru-stone C615480-310-430
      • Black granite
      • Top: 120cm x 73cm x 8" thick
      • Steel base has wheels and adjustable feet
      • Removable polished stainless steel brackets protect edges
      • air reservoir: CG1-RES-100-UKC-2331-300
  • Air filters: Techsol 99-28040-00 and 99-04010-00  filter/fan units
  • Control cabinet includes power conditioners, power supplies and control electronics
  • Power: 208V 3phase 16A/phase
  • Control computer has missing hard drive, system can't run without this!

30 Day Guarantee

  • Guaranteed to be as described
  • Can be returned for flaws or malfunctions that were not disclosed
  • See complete terms

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